Cov kua nitrogen txias tshuab yog dav siv nyob rau hauv semiconductor & nti kev lag luam, nrog rau cov txheej txheem ntawm,
- Kev siv tshuab ntawm Molecular Beam Epitaxy (MBE)
- Lub nti kuaj tom qab pob COB
Yam khoom
Vacuum Insulated Yeeb Nkab Series
Vacuum Insulated Flexible Hose Series
Dynamic Nqus Pump System
Vacuum Insulated Phase Separator Series
Nqus Insulated Valve Series
Piping System Txhawb Cov Khoom Siv
MOLECULAR BEAM EPITAXY
Lub tshuab ntawm Molecular Beam Epitaxy (MBE) tau tsim nyob rau xyoo 1950 los npaj cov khoom siv semiconductor nyias siv tshuab nqus tsev vacuum.Nrog rau txoj kev loj hlob ntawm lub tshuab nqus tsev ultra-siab, daim ntawv thov ntawm kev siv tshuab tau txuas ntxiv mus rau kev tshawb fawb semiconductor.
HL tau pom qhov kev thov ntawm MBE kua nitrogen txias qhov system, txhim kho cov pob txha pob txha kom ua tiav qhov tshwj xeeb MBE kua nitrogen cooing system rau MBE thev naus laus zis thiab ua tiav cov txheej txheem ntawm lub tshuab nqus tsev insulated piping system, uas tau siv hauv ntau lub lag luam, tsev kawm qib siab thiab cov chaw tshawb fawb. .
Cov teeb meem tshwm sim ntawm semiconductor & chip kev lag luam suav nrog,
- Lub Siab ntawm Liquid Nitrogen rau hauv Terminal (MBE) Cov Khoom Siv.Tiv thaiv kom tsis txhob muaj kev kub ntxhov ntau dhau los ntawm kev puas tsuaj Terminal (MBE) cov cuab yeej.
- Ntau Cryogenic kua Inlet thiab qhov hluav taws xob tswj
- Qhov kub ntawm cov kua Nitrogen rau hauv cov khoom siv Terminal
- Tus nqi tsim nyog ntawm Cryogenic Gas Emissions
- (Tsis siv neeg) Hloov cov kab loj thiab ceg ntoo
- Kev kho siab (txo) thiab ruaj khov ntawm VIP
- Ntxuav Tshem Tawm Qhov Ua Tau Tsis Muaj Qhov Ncauj thiab Cov Dej Dej Dej Los Ntawm Lub Tank
- Lub Sijhawm Filling ntawm Terminal Liquipment Equipment
- Pipeline Precooling
- Ua kua ua kua hauv VIP System
- Tswj kev poob ntawm cov kua Nitrogen thaum lub sij hawm tsis tu ncua kev pab cuam ntawm lub system
HL's Vacuum Insulated Pipe (VIP) yog tsim los rau ASME B31.3 Pressure Piping code raws li tus qauv.Kev paub txog engineering thiab kev tswj xyuas kev muaj peev xwm los xyuas kom meej qhov ua tau zoo thiab tus nqi-zoo ntawm cov neeg siv khoom cog.
Kev daws
HL Cryogenic Equipment muab cov neeg siv khoom nrog Lub Tshuab Nqus Tsev Insulated Piping System kom tau raws li qhov yuav tsum tau ua thiab cov xwm txheej ntawm kev lag luam semiconductor & nti:
1.Quality Management System: ASME B31.3 Siab Piping Code.
2.A Cov Phaj Tshwj Xeeb Separator nrog Ntau Cryogenic Liquid Inlet thiab Outlet nrog kev tswj tsis siv neeg ua tau raws li qhov yuav tsum tau muaj cov pa roj carbon monoxide, rov ua kua nitrogen thiab kub ntawm cov kua nitrogen.
3.Qhov tsim nyog thiab raws sij hawm tso tawm kom ntseeg tau tias cov khoom siv davhlau ya nyob twg ib txwm ua haujlwm nyob rau hauv tus nqi tsim siab.
4.Lub Gas-kua Barrier muab tso rau hauv ntsug VI yeeb nkab nyob rau hauv kawg ntawm VI pipeline.Gas-kua Barrier siv lub hauv paus ntsiab lus ntawm cov roj foob los thaiv cov cua sov los ntawm qhov kawg ntawm VI pipeline mus rau VI Piping, thiab txo qhov poob ntawm cov kua nitrogen thaum lub sij hawm discontinuous thiab intermittent kev pab cuam ntawm lub system.
5.VI Piping Tswj los ntawm Lub Tshuab Nqus Tsev Insulated Valve (VIV) Series: Xws li Lub Tshuab Nqus Tsev Insulated (Pneumatic) Shut-off Valve, Nqus Insulated Check Valve, Nqus Insulated Regulating Valve thiab lwm yam. Ntau hom VIV tuaj yeem ua ke ua ke los tswj VIP raws li xav tau.VIV yog kev koom ua ke nrog VIP prefabrication nyob rau hauv chaw tsim tshuaj paus, tsis muaj nyob rau ntawm qhov chaw Insulated kho.Lub foob foob ntawm VIV tuaj yeem hloov tau yooj yim.(HL lees txais lub npe hu ua cryogenic valve hom tsim los ntawm cov neeg siv khoom, thiab tom qab ntawd ua lub tshuab nqus tsev vacuum los ntawm HL. Qee lub npe thiab cov qauv ntawm cov li qub yuav tsis tuaj yeem ua rau hauv lub tshuab nqus tsev vacuum.)
6.Cleanliness, yog tias muaj kev xav tau ntxiv rau kev huv ntawm lub raj sab hauv.Nws tau pom zoo tias cov neeg siv khoom xaiv BA lossis EP stainless hlau kav raws li VIP cov kav dej sab hauv kom txo tau cov hlau tsis huv ntxiv.
7.Vacuum Insulated Filter: Ntxuav cov impurities thiab dej khov seem ntawm lub tank.
8.Tom qab ob peb hnub lossis kaw ntev dua lossis kev saib xyuas, nws yog qhov tsim nyog rau precool VI Piping thiab cov khoom siv davhlau ya nyob twg ua ntej cov kua cryogenic nkag mus, kom tsis txhob muaj dej khov slag tom qab cov kua cryogenic ncaj qha nkag mus rau VI Piping thiab cov khoom siv davhlau ya nyob twg.Precooling muaj nuj nqi yuav tsum tau xav txog hauv kev tsim.Nws muab kev tiv thaiv zoo dua rau cov khoom siv davhlau ya nyob twg thiab VI Piping cov cuab yeej txhawb nqa xws li li qub.
9.Suit rau ob qho tib si Dynamic thiab Static Vacuum Insulated (Flexible) Piping System.
10.Dynamic Vacuum Insulated (Slexible) Piping System: Muaj VI Flexible Hoses thiab/lossis VI Yeeb Nkab, Jumper Hoses, Nqus Insulated Valve System, Phase Separators thiab Dynamic Vacuum Pump System (xws li lub tshuab nqus tsev twj, solenoid li qub thiab lwm yam. ).Qhov ntev ntawm ib leeg VI Flexible Hose tuaj yeem kho raws li tus neeg siv khoom xav tau.
11.Various Connection Types: Vacuum Bayonet Connection (VBC) Hom thiab Welded Connection tuaj yeem xaiv tau.Hom VBC tsis xav tau kev kho mob ntawm qhov chaw.