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Cov kua dej nitrogen txias tshuab yog siv dav hauv lub semiconductor & Chip kev lag luam, suav nrog cov txheej txheem ntawm,
- Tshuab thev naus laus zis ntawm molecular nqaj xaiv (MBE)
- Lub nti kev sim tom qab cob pob
Lwm Yam Khoom
Molecular nqaj xaiv
Tshuab thev naus laus zis molecular nqaj epitaxy (MBE) tau tsim nyob rau xyoo 1950 los npaj cov ntaub ntawv zaj duab xis nyias nyias siv lub tshuab nqus hluav taws xob. Nrog rau kev txhim kho ntawm ultra-siab nqus thev naus laus zis, daim ntawv thov kev thev naus laus zis tau txuas ntxiv mus rau tom teb ntawm semiconductor science.
Hl tau pom qhov xav tau ntawm MBe ua kua nitrogen txias system nitrogen sib zog ua kua rau MBE cov khoom siv ua kua, uas tau siv nyob rau hauv ntau cov lag luam, cov tsev kawm qib siab thiab cov chaw tshawb fawb Cov.
Cov teeb meem tshwm sim ntawm cov semiconductor & Choj kev lag luam suav nrog,
- Lub siab ntawm cov kua nitrogen rau hauv davhlau ya nyob twg (MBE) khoom. Tiv thaiv kev nyuaj siab los ntawm kev puas tsuaj rau lub davhlau ya nyob twg (MBE) khoom.
- Ntau yam tsis muaj zog tso kua mis thiab hluav taws xob
- Qhov kub ntawm cov kua nitrogen rau hauv cov khoom siv tawm hauv cov khoom siv
- Ib qho nyiaj tsim nyog ntawm cryogenic roj emissions
- (Tsis siv neeg) hloov ntawm cov kab loj thiab ceg
- Siab hloov kho (txo qis) thiab muaj kev ruaj khov ntawm VIP
- Tu tseg qhov ua tau impurities thiab dej khov nyob ntawm tank
- Sau lub sij hawm ntawm cov khoom siv ua kua
- Pipeline Prepooling
- Cov kua tiv thaiv hauv Vip system
- Tswj kom poob ntawm cov kua nitrogen thaum ua tsis tau kev pab cuam ntawm lub system
Hl lub tshuab nqus tsev insulated (VIP) yog tsim los asme B31.3 Kev siab Piping Code ua tus qauv. Kev tsim kho tshuab thiab kev tswj hwm zoo kom ntseeg tau tias qhov ua tau zoo thiab raug nqi zoo ntawm cov neeg siv khoom cog.
Cov kev daws teeb meem
Cov khoom siv cryogenic muab cov neeg siv khoom nrog lub tshuab nqus tsev istulated txheej txheem kom tau raws li cov cai thiab cov kev cai ntawm lub tshuab ua haujlwm & tej yam kev lag luam:
1.Qhov kev tswj hwm kev tswj hwm: ASME B31.3 PIPING code.
2.A tshwj xeeb qib separator nrog ntau cov kua cryogenic ua kua thiab qhov hluav taws xob nrog kev tswj hwm kev tswj hwm tau ua tiav, rov ua kua nitrogen thiab kub ntawm cov kua nitrogen.
3.Txoj kev tsim nyog thiab ua haujlwm lim dej ua kom ua kom cov khoom siv davhlau ya nyob ib txwm ua haujlwm nyob rau hauv tus nqi tsim.
4. Cov kua roj-kua hluav taws xob yog muab tso rau hauv txoj kab ntsug vi yeeb yaj kawg ntawm vi pipeline kawg. Cov roj-kua roj siv cov roj ci hauv cov roj ntsha kom thaiv cov kua dej vi thaum kawg
5.Vi piping tau tswj los ntawm lub tshuab nqus tsev Insulated Valve (VIV) series: suav nrog lub tshuab nqus tsev (pneumatic) Yuav tsum muaj. VIV yog sib xyaw nrog VIP ua kom ua haujlwm hauv cov chaw tsim khoom, tsis muaj chaw kho insulated. Cov twj foob pob ntawm Viv tuaj yeem hloov tau yooj yim. (Hl lees txais lub cryogenic valve hom xaiv los ntawm cov neeg siv khoom, thiab tom qab ntawd ua kom lub tshuab nqus tsev, thiab cov qauv ntawm cov li qub yuav tsis tuaj yeem ua rau lub tshuab nqus tsev.)
6.Txhua yuav tau, yog tias muaj cov kev xav tau ntxiv rau sab hauv lub raj kom huv. Nws tau pom zoo tias cov neeg yuav khoom xaiv BA lossis EP Stainless Hlau kav li Vip sab hauv mus ntxiv txo cov hlau tsis muaj roj.
7.vacuum cov lim lim: ntxuav kom huv kom muaj cov impurities thiab dej khov nyob hauv tank.
8.Tom qab ob peb hnub lossis kev tu dua tshiab, nws yog qhov tsim nyog rau precool yog kom zam dhau cov kua dej tawg, yog li kom tsis txhob muaj vi piping thiab terminal khoom siv. Prekooling muaj nuj nqi yuav tsum tau txiav txim siab nyob rau hauv kev tsim. Nws muab kev tiv thaiv zoo dua rau cov khoom siv davhlau ya thiab viping vi piping txhawb nqa xws li li qub.
9.00 rau ob qho tib si dynamic thiab lub tshuab nqus hluav taws xob zoo li qub (yoog raws) piping system.
10.Dynamic lub tshuab nqus tsev insulated (yoog raws) piping system: muaj vol yooj yim, xws li lub tshuab nqus tsev, xws li lub tshuab nqus tsev, tshuab solenoid li qub thiab cov nqus tsev gauges thiab lwm yam. ). Qhov ntev ntawm ib vi yoog tau hose tuaj yeem kho tau raws li tus neeg siv yuav tsum tau ua.
11.Qhov kev sib txuas txuas ntxiv: Lub tshuab nqus tsev bayonet kev sib txuas (VBC) hom thiab welded kev sib txuas tau tuaj yeem xaiv tau. Hom VBC tsis xav tau kev kho mob insulated.