Molecular Beam Epitaxy (MBE) yog ib txoj kev siv tshuab uas siv los tsim cov zaj duab xis nyias thiab cov nanostructures rau ntau yam kev siv, suav nrog cov khoom siv semiconductor, optoelectronics, thiab quantum computing. Ib qho ntawm cov teeb meem tseem ceeb hauv MBE systems yog tswj qhov kub thiab txias qis heev, uas yog qhov twglub raj xa dej nqus tsev vacuums (VJP) los ua si. Cov kav dej siab heev no yog qhov tseem ceeb rau kev tswj hwm cua sov hauv MBE chambers, ua rau lawv yog ib qho tseem ceeb hauv kev ua tiav kev loj hlob zoo ntawm cov ntaub ntawv ntawm qib atomic.
Molecular Beam Epitaxy (MBE) yog dab tsi?
MBE yog ib txoj kev tso cov khoom uas cuam tshuam nrog kev tswj cov atomic beams lossis molecular beams rau ntawm ib lub substrate hauv ib puag ncig uas muaj qhov chaw nqus tsev siab. Cov txheej txheem xav tau kev tswj qhov kub kom meej kom ua tiav cov khoom siv xav tau, uas ua rau kev tswj hwm thermal yog qhov tseem ceeb. Hauv MBE systems,cov kav dej nqus tsev vacuumsiv los nqa cov kua thiab cov pa roj cryogenic, kom ntseeg tau tias lub substrate tseem nyob rau qhov kub thiab txias thaum lub sijhawm tso dej.
Lub Luag Haujlwm ntawm Cov Kav Dej Nqus Tsev hauv MBE Systems
Hauv kev siv tshuab MBE,cov kav dej nqus tsev vacuumfeem ntau yog siv los thauj cov cryogens xws li kua nitrogen thiab kua helium kom txias lub MBE chamber thiab cov khoom cuam tshuam. Cov kav dej muaj cov kav dej sab hauv uas tuav cov kua cryogenic, puag ncig los ntawm lub tsho sab nraud rwb thaiv tsev nrog txheej nqus tsev. Lub tshuab nqus tsev rwb thaiv tsev no txo qhov hloov pauv cua sov, tiv thaiv kev hloov pauv kub thiab xyuas kom meej tias lub kaw lus tswj tau qhov kub qis heev uas xav tau rau MBE.
Cov txiaj ntsig ntawm kev siv cov kav dej nqus tsev hauv MBE Technology
Kev siv ntawmcov kav dej nqus tsev vacuumHauv kev siv tshuab MBE muaj ntau yam zoo. Ua ntej, lawv ua kom muaj kev tswj cua sov kom raug rau kev tso cov zaj duab xis nyias zoo, uas yog qhov tseem ceeb rau kev ua tiav kev loj hlob ntawm cov khoom sib xws. Qhov thib ob, lawv pab txo qhov kev pheej hmoo ntawm kev ua qias tuaj hauv MBE ib puag ncig los ntawm kev tswj hwm kev ncaj ncees ntawm lub tshuab nqus tsev. Thaum kawg,cov kav dej nqus tsev vacuumtxhim kho qhov kev ua haujlwm zoo ntawm MBE system los ntawm kev txo qis qhov boil-off ntawm cov kua cryogenic, ua rau cov nqi ua haujlwm qis dua thiab lub neej ntev dua ntawm lub kaw lus.
Yav Tom Ntej ntawm Cov Kav Dej Nqus Tsev hauv MBE Daim Ntawv Thov
Raws li MBE thev naus laus zis txuas ntxiv mus thiab qhov xav tau rau qhov tseeb siab dua loj hlob,cov kav dej nqus tsev vacuumyuav ua lub luag haujlwm tseem ceeb zuj zus. Kev tsim kho tshiab hauv cov ntaub ntawv rwb thaiv tsev thiab kev tsim qauv yuav txhim kho kev ua haujlwm ntawm cov kav dej no, txhim kho kev siv hluav taws xob ntawm MBE systems thiab ua rau muaj kev tsim cov ntaub ntawv siab dua. Raws li kev lag luam xws li kev tsim khoom semiconductor thiab kev suav lej quantum txuas ntxiv nthuav dav, qhov xav tau rau kev daws teeb meem thermal txhim khu kev qha thiab ua haujlwm tau zoo, xws licov kav dej nqus tsev vacuum, yuav tsuas loj hlob xwb.
Xaus lus,cov kav dej nqus tsev vacuumyog ib qho tseem ceeb hauv cov txheej txheem MBE, ua kom muaj kev tswj qhov kub thiab txias thiab ua kom ntseeg tau tias cov yeeb yaj kiab nyias zoo. Raws li qhov kev thov rau cov ntaub ntawv siab heev txuas ntxiv nce ntxiv, cov kav dej no yuav tseem ceeb rau kev tswj hwm qhov chaw kub qis uas xav tau rau cov thev naus laus zis MBE tshiab.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-28-2024
