Molecular Beam Epitaxy thiab Liquid Nitrogen Circulation System hauv Semiconductor thiab Chip Industry

Cov Lus Qhia Luv Luv ntawm Molecular Beam Epitaxy (MBE)

Cov thev naus laus zis ntawm Molecular Beam Epitaxy (MBE) tau tsim nyob rau xyoo 1950 los npaj cov ntaub ntawv semiconductor nyias zaj duab xis siv cov thev naus laus zis nqus tsev vacuum. Nrog rau kev txhim kho ntawm cov thev naus laus zis ultra-high vacuum, daim ntawv thov thev naus laus zis tau nthuav dav mus rau thaj chaw ntawm kev tshawb fawb semiconductor.

Lub hom phiaj ntawm kev tshawb fawb txog cov ntaub ntawv semiconductor yog qhov xav tau cov khoom siv tshiab, uas yuav txhim kho kev ua haujlwm ntawm lub kaw lus. Nyob rau hauv lem, cov khoom siv tshiab thev naus laus zis yuav tsim cov khoom siv tshiab thiab cov thev naus laus zis tshiab. Molecular beam epitaxy (MBE) yog lub tshuab nqus tsev siab rau epitaxial txheej (feem ntau yog semiconductor) kev loj hlob. Nws siv lub teeb cua sov ntawm cov atoms qhov chaw lossis cov molecules cuam tshuam rau ib qho crystal substrate. Cov yam ntxwv ultra-siab nqus tsev ntawm cov txheej txheem tso cai rau in-situ metallization thiab kev loj hlob ntawm cov ntaub ntawv insulating ntawm cov semiconductor tshiab loj hlob, ua rau muaj kev sib txuas tsis muaj kuab paug.

xov xwm bg (4)
xov xwm bg (3)

Kev Siv Tshuab MBE

Lub molecular beam epitaxy tau ua nyob rau hauv lub tshuab nqus tsev siab lossis ultra-siab nqus tsev (1 x 10-8Pa) ib puag ncig. Qhov tseem ceeb tshaj plaws ntawm molecular beam epitaxy yog nws qhov qis deposition tus nqi, uas feem ntau tso cai rau zaj duab xis kom epitaxial loj hlob ntawm tus nqi tsawg dua 3000 nm ib teev. Qhov qis deposition tus nqi no yuav tsum muaj lub tshuab nqus tsev siab txaus kom ua tiav tib theem ntawm kev huv li lwm txoj kev deposition.

Yuav kom ua tau raws li qhov chaw nqus cua siab heev uas tau piav qhia saum toj no, lub cuab yeej MBE (Knudsen cell) muaj ib txheej txias, thiab qhov chaw nqus cua siab heev ntawm chav loj hlob yuav tsum tau tswj hwm siv lub tshuab ua kua nitrogen. Cov kua nitrogen ua rau lub cuab yeej txias qhov kub sab hauv mus rau 77 Kelvin (−196 ° C). Qhov chaw kub qis tuaj yeem txo cov ntsiab lus ntawm cov khoom tsis huv hauv lub tshuab nqus cua thiab muab cov xwm txheej zoo dua rau kev tso cov yeeb yaj kiab nyias. Yog li ntawd, yuav tsum muaj lub tshuab ua kua nitrogen txias rau cov cuab yeej MBE kom muab cov khoom siv nitrogen -196 ° C tas mus li thiab ruaj khov.

Cov Kua Nitrogen Txias Kev Ua Haujlwm

Lub tshuab nqus tsev ua kua nitrogen txias feem ntau suav nrog,

● lub tank cryogenic

● lub raj xa dej loj thiab ceg uas muaj lub tshuab nqus tsev / lub raj xa dej uas muaj lub tshuab nqus tsev

● MBE tshwj xeeb theem separator thiab lub tshuab nqus tsev jacketed pa tawm yeeb nkab

● ntau yam twj tso kua mis uas muaj lub tshuab nqus tsev

● roj-kua thaiv

● lim dej nqus tsev

● lub tshuab nqus tsev dynamic

● Lub kaw lus ua ntej txias thiab ntxuav rov qab ua kom sov

Lub Tuam Txhab Khoom Siv Cryogenic HL tau pom qhov kev thov ntawm MBE kua nitrogen txias system, teeb tsa cov txheej txheem kev siv tshuab kom ua tiav kev tsim kho tshwj xeeb MBE kua nitrogen cooing system rau MBE thev naus laus zis thiab cov txheej txheem ua tiav ntawm cov khoom siv nqus tsev insulator.edcov kav dej, uas tau siv hauv ntau lub tuam txhab, tsev kawm qib siab thiab cov koom haum tshawb fawb.

xov xwm bg (1)
xov xwm bg (2)

Cov Khoom Siv Cryogenic HL

HL Cryogenic Equipment uas tau tsim muaj xyoo 1992 yog ib lub npe koom tes nrog Chengdu Holy Cryogenic Equipment Company hauv Suav teb. HL Cryogenic Equipment tau cog lus rau kev tsim thiab tsim cov High Vacuum Insulated Cryogenic Piping System thiab lwm yam khoom siv txhawb nqa.

Yog xav paub ntxiv, thov mus saib lub vev xaib officialwww.hlcryo.com, los yog xa email rauinfo@cdholy.com.


Lub sijhawm tshaj tawm: Tsib Hlis-06-2021